https://nanyte.com/photoresists/s1818 · last updated 2026-07-12
- Manufacturer
- Rohm and Haas Electronic Materials
- Tone
- positive
- Chemistry
- DNQ-novolak
Unverified — not yet human-checked; values transcribed from the datasheet, characterize on-tool.
Spin coating
Microposit S1818 is spin-coated to —. The curve below is redrawn from the manufacturer's published data — read your target thickness off the vertical axis and take the matching spin speed as a starting point.
Data points
| Series | rpm | µm |
|---|---|---|
| S1818 G2 | 2000 | 2.6 |
| 3000 | 2.1 | |
| 4000 | 1.9 | |
| 5000 | 1.7 | |
| 6000 | 1.6 | |
| 7000 | 1.5 |
Values are the manufacturer's starting points, not a guarantee; verify on your own tool. Characterize on-tool. Series digitized from a published figure were independently cross-checked by a second blind read; treat those values as approximate (±10 %).
read from figure, 'MICROPOSIT S1800 G2 Photoresist Undyed Series Spin Speed Curves' (Figure 2), p.2 of MICROPOSIT S1800 G2 Series Photoresists datasheet (Rohm and Haas Electronic Materials, ME06N041, Rev. 0, October 2006); identified as the highest of four plotted traces (diamond marker, legend order S1818/S1813/S1811/S1805 top-to-bottom by thickness — the four curves do not cross across the plotted range); read at gridline/marker crossings every 1,000 rpm from 2,000–7,000 rpm off a linear-linear chart (thickness 0–40,000 Å, spin speed 1,000–8,000 rpm); no numeric table accompanies the figure so no independent point-value anchor exists in the document — visual chart-reading only, typical uncertainty ~10–15%; digitized 2026-07-12
Figure 2 ('MICROPOSIT S1800 G2 Photoresist Undyed Series Spin Speed Curves', p.2) plots four traces — S1818 G2, S1813 G2, S1811 G2, S1805 G2 — on one axis (spin speed 1,000–8,000 rpm vs photoresist thickness 0–40,000 Å), each carrying a distinct legend marker (diamond, triangle, square, cross respectively, in that order top-to-bottom by thickness) and, because the four curves do not cross across the plotted range, S1818 G2 (diamond marker) is identified as the highest trace at every spin speed. The trace was digitized 2026-07-12 by reading gridline/marker crossings at 1,000 rpm intervals from 2,000–7,000 rpm (see spinCurves); no numeric thickness-vs-rpm table accompanies the figure, so there is no independent point-value anchor and the digitized values carry typical chart-reading uncertainty (~10–15% — see spinCurves[0].source). Table 2 (p.2) records that Figure 2's coatings used an SVG 81 coater and a 115°C/60 sec hotplate softbake on silicon, measured on a Nanometrics 210 — that condition applies to this grade's trace and is recorded under softbake below. The document states maximum coating uniformity is 'typically attained between the spin speeds of 3,500–5,500 rpm' (p.2, series-wide statement, not S1818-specific). No rehydration hold or edge-bead handling is discussed anywhere in the document.
- Adhesion
Soft bake
- Soft bake
- 115 °C · 60 s · hotplate
- Notes
SOURCE: Table 2, p.2 of MICROPOSIT S1800 G2 SERIES PHOTORESISTS, ME06N041, Rev. 0, October 2006
Exposure dose
The manufacturer does not publish a clearing dose for Microposit S1818. Determine it with a dose array on your own tool.
- As published
Not published for this resist: Dose at 365 nm, Dose at 405 nm — characterize on-tool.
Development
Not published for this resist: Developer, Dilution, Time, Method, Rinse — characterize on-tool.
Hard bake, etch & strip
- Stripper
- "Residue-free photoresist removal using standard MICROPOSIT removers" (ADVANTAGES section, p.1) — no specific remover product is named.
- Storage
Not published for this resist: Hard bake, Descum, Etch resistance — characterize on-tool.
Where it's used
This grade appears exactly once in the document: as the highest of four traces (alongside S1805, S1811 and S1813 G2) on the undyed-series film-thickness-vs-spin-speed chart (Figure 2, p.2). Pick S1818 G2 over its thinner S1805/S1811/S1813 siblings when the process needs the most film a single S1800 G2 coat can give — it sits at the top of the series' spin-speed chart, coating thickest of the four undyed grades at any given speed. No dose, develop time, or lithographic-performance data (contrast curve, Dill parameters, absorbance spectrum, masking linearity, exposure/focus latitude — Figures 4–9, Tables 4–9) is published for S1818 specifically; every one of those figures and tables explicitly names MICROPOSIT S1813 G2 as the tested grade, and none of that data may be borrowed here. The document states the S1800 G2 system broadly is optimized for g-line (436 nm) exposure and usable across 350–450 nm, is compatible with HMDS-based MICROPOSIT primers, and works with both metal-ion-free (MF-319 family) and metal-ion-bearing MICROPOSIT developers, but none of those statements carry an S1818-specific number. This recipe replaces an earlier extraction made from the superseded circa-1993 Shipley 'MPR S1800 1093' edition, per a WL decision on 2026-07-10; the S1800 line traces from Shipley through Rohm and Haas Electronic Materials (publisher of this G2 edition) to Dow, DuPont, and today's Kayaku Advanced Materials. Chemistry classified as dnq-novolak directly from the Dow/Rohm and Haas MICROPOSIT S1818 MSDS composition table (mixed cresol novolak resin + diazo photoactive compound) (chemistry classified 2026-07-12 from manufacturer SDS/TDS).
Sources & disclaimer
- Rohm and Haas Electronic Materials — Microposit S1818 datasheet (ME06N041, Rev. 0, October 2006) · accessed 2026-07-10
- https://amolf.nl/wp-content/uploads/2016/09/datasheets_S1800.pdf — AMOLF-hosted mirror of the superseded ~1993 Shipley 'MPR S1800 1093' edition of the S1800 datasheet, archived here per the 2026-07-10 WL decision to re-extract S1818 from the current G2 edition instead; retained as a reference, not a data source for this recipe.
- https://aggiefab.tamu.edu/wp-content/uploads/2021/04/Microposit-S1818-G2-Positive-Photoresist-MSDS.pdf — Dow/Rohm and Haas MICROPOSIT S1818 MSDS states 'Mixed cresol novolak resin 15.0-25.0%, Diazo Photoactive Compound 1.0-10.0%'; the basis for classifying S1818 as dnq-novolak.
Manufacturer datasheet values are starting points; optimal parameters depend on your substrate, equipment and environment. Product names and trademarks belong to their respective owners. NANYTE is not affiliated with the manufacturers listed. Last updated 2026-07-12.